Regeneration of
cryo pumps

The backing pump of a cryo pump should also be able to handle the gas volumes generated during regeneration without introducing impurities into the vacuum system. The vacuum pump should therefore operate free of oil and abrasion.

Product recommendations

Screw pumps

As a backing pump, the VACUU·PURE screw pump provides a clean ultimate vacuum in the range of 10^-3 mbar. It combines three important advantages for the user: 100% oil-free, no abrasion, no wear parts. VACUU·PURE is ideal for clean processes that require dry and hydrocarbon-free vacuum. The spindles of the screw pump run contact-free and are therefore both abrasion-free and wear-free. VACUU·PURE has been specially developed for processes in the vacuum range down to 10^-3 mbar, but can also be operated at higher pressures for longer periods. Even larger systems can be evacuated from atmospheric pressure down to the 10^-3 mbar vacuum range without changing the vacuum pump. The chemically resistant version VACUU·PURE 10C is available for working with aggressive media.

VACUU·PURE 10

for non-corrosive media
5 x 10^-3 mbar | 10 m³/h

VACUU·PURE 10C

chemically resistant
5 x 10^-3 mbar | 9 m³/h

VACUU·VIEW extended

for vacuum measurement from atmospheric pressure to 10^-3 mbar

VACUU·SELECT

package fine vacuum control
down to 10^-3 mbar

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Backing pumps for cryo pumps

Fore vacuum and regeneration

During regeneration of the cryo pump, the valve to the UHV chamber is closed and the pump is warmed up to ambient temperature. The previously bound molecules desorb again and return to the gas phase. The backing pump must now pump out the released gases and then lower the vacuum as low as possible so that the cryo pump can be cooled down again.

The ultimate vacuum and pumping speed of the backing pump must therefore be designed for both the generation of the fore vacuum and the regeneration of the cryo pump.

In addition to the performance data, clean and hydrocarbon-free vacuum is required for many applications, especially in physics. Oil-free pump types are therefore generally preferable in order to avoid contamination from oil vapors. The pump should also not generate any abrasion that could enter the vacuum system. If aggressive gases are pumped, a chemically resistant vacuum pump is required.

The VACUU·PURE screw pump meets all these criteria. It is therefore perfectly suited as a backing pump and for cryo pump regeneration. VACUU·PURE has been specially developed for processes in the vacuum range down to 10^-3 mbar, but can also be operated at higher pressures for longer periods. This means that even larger systems can be evacuated from atmospheric pressure to the 10^-3 mbar vacuum range without changing the vacuum pump. The chemically resistant version VACUU·PURE 10C is available for working with aggressive media.

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Blog posts

Schraubenpumpe VACUU·PURE® im Einsatz an der ETH Zürich

Customer stories

Cryopump regeneration

ETH Zurich relies on abrasion-free VACUU·PURE® screw pump

Clemens Todt conducts exciting basic research at the Swiss Federal Institute of Technology in Zurich (ETH), where he is a doctoral student in the Laboratory of Solid State Physics. The results of his Advanced Semiconductor Quantum Materials group, led by Professor Wegscheider, could optimize the properties of quantum computers in the future. In…

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Regeneration of cryo pumps

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Backing pumps for cryo pumps

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Regeneration of
cryo pumps