Fore vacuum
for HV and UHV

Deep, clean fore vacuum is one of the key factors for the ultimate vacuum and the purity in high vacuum or ultra-high vacuum systems.

Product recommendations

Screw pumps

As a backing pump, the VACUU·PURE screw pump provides a clean ultimate vacuum in the range of 10^-3 mbar. It combines three important advantages for the user: 100% oil-free, no abrasion, no wear parts. VACUU·PURE is ideal for clean processes that require dry and hydrocarbon-free vacuum. The spindles of the screw pump run contact-free and are therefore both abrasion-free and wear-free. VACUU·PURE has been specially developed for processes in the vacuum range down to 10^-3 mbar, but can also be operated at higher pressures for longer periods. Even larger systems can be evacuated from atmospheric pressure down to the 10^-3 mbar vacuum range without changing the vacuum pump. The chemically resistant version VACUU·PURE 10C is available for working with aggressive media.

VACUU·PURE 10

for non-corrosive media
5 x 10^-3 mbar | 10 m³/h

VACUU·PURE 10C

chemically resistant
5 x 10^-3 mbar | 9 m³/h

VACUU·VIEW extended

for vacuum measurement from atmospheric pressure to 10^-3 mbar

VACUU·SELECT

package fine vacuum control
down to 10^-3 mbar

Diaphragm pumps

Diaphragm pumps are ideal for clean fore-vacuum down to approx. 1 mbar. They run 100 % oil-free and have no abrasive seals that can cause abrasion. An important advantage of VACUUBRAND diaphragm pumps is their unrivaled reliability and long maintenance intervals. The selection of the appropriate pump depends on the required fore vacuum, the desired pump-down time and the expected gas load.

MD 4 NT

for non-corrosive media
1 mbar | 3.8 m³/h

MD 12 NT

for non-corrosive media
1.5 mbar | 12.1 m³/h

MV 2 NT

for non-corrosive media
0.5 mbar | 2.2 m³/h

MV 10 NT

for non-corrosive media
0.5 mbar | 10.4 m³/h

VARIO^® diaphragm pumps

Our VARIO® diaphragm pumps for the pressure range down to 0.3 mbar offer particular advantages: VARIO technology regulates the vacuum precisely and according to the need by adaptively adjusting the motor speed of the pump. The patented "Turbo Mode" automatically finds the optimum motor speed for the backing pump. The result: continuous adjustment across the entire pressure range to achieve maximum effective pumping speed and the lowest ultimate vacuum. Thanks to the VARIO control, the pump never runs faster than necessary. This makes the pump whisper-quiet, reduces energy consumption and vibration and also extends the service life of the diaphragms.

MD 4 VARIO select

for non-corrosive media
1.5 mbar | 5.7 m³/h

MV 2 VARIO select

for non-corrosive media
0.3 mbar | 3.3 m³/h

MD 12 NT VARIO select

for non-corrosive media
1.5 mbar | 13.4 m³/h

MV 10 NT VARIO select

for non-corrosive media
0.3 mbar | 12.1 m³/h

Chemistry diaphragm pumps

VACUUBRAND chemistry diaphragm pumps stand for uncompromising chemical resistance - even when used with aggressive chemicals. To achieve this, we use carefully selected materials. They provide the same benefits as the diaphragm pumps for non-corrosive media and are also available with VARIO control.

MD 4C NT

chemically resistant
1.5 mbar | 3.4 m³/h

MV 10C NT

chemically resistant
0.9 mbar | 9.5 m³/h

PC 3003 VARIO select

chemically resistant
0.6 mbar | 2.8 m³/h

PC 3010 NT VARIO select

chemically resistant
0.6 mbar | 13.0 m³/h

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Backing pumps for high vacuum systems

The details make the difference

A deep, clean fore vacuum is key to the ultimate vacuum that can be achieved and the purity in high vacuum or ultra-high vacuum systems.

The backing pump for turbomolecular pumps must be selected to match their maximum permissible fore vacuum. With small gas flows, the ultimate vacuum of the backing pump is also decisive for the achievable ultimate vacuum of the overall system.

The pumping speed determines both the pump-down time and the maximum amount of gas that can be pumped by the pump system in continuous operation. If the backing pump cannot handle the gas volume, the fore vacuum at the turbomolecular pump increases, which can lead to the pump being overloaded and switched off. It is advantageous for the backing pump to maintain a constantly high pumping speed down to low suction pressures.

In addition to the performance data, clean and hydrocarbon-free vacuum is required for many applications, especially in physics. Oil-free pump types are therefore generally preferable in order to avoid contamination from oil vapors. It is also important to ensure that the pump does not generate any abrasion that enters the vacuum system.

To enable continuous operation and avoid interruptions in the overall system, the backing pump should be as reliable, durable and low maintenance as possible. If aggressive gases are being pumped, a chemically resistant vacuum pump is required.

Diaphragm pumps meet all these requirements perfectly for fore vacuums down to approx. 1 mbar. The VACUU·PURE screw pump offers dry and hydrocarbon-free ultimate vacuum in the range of 10^-3 mbar.

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Blog posts

Michael Freitag an vorbereiteten Baugruppen des Elektronen-Linearbeschleunigers ELBE des Helmholtz-Zentrums Dresden-Rossendorf

Customer stories

Vacuum pump supports accelerator operation

Institute of Radiation Physics at HZDR tests VACUU·PURE® 10

Michael Freitag works at the ELBE linear accelerator of the Institute of Radiation Physics at the Helmholtz-Zentrum Dresden-Rossendorf (HZDR). As an operating engineer, he is responsible for the entire vacuum infrastructure and was delighted to be able to test the new 100% oil-free, abrasion-free VACUU·PURE® 10 screw pump from VACUUBRAND under real…

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